High-Capacitance Thin Film Tantalum Electrolytic Capacitor Fabricated from Electrochemically Etched Tantalum Foils

doi:10.12146/j.issn.2095-3135.20201119001

Home > Archive>Volume 10, Issue 1, 2021 >35-46. DOI:10.12146/j.issn.2095-3135.20201119001

High-Capacitance Thin Film Tantalum Electrolytic Capacitor Fabricated from Electrochemically Etched Tantalum Foils
DOI:
                        10.12146/j.issn.2095-3135.20201119001
                    
Author:
                        GUO YongfuGUO Yongfu
Shenzhen Institute of Advanced Electronic Materials, Shenzhen? 518103, China；Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen? 518055, China；Institute of Nano Science and Technology, University of Science and Technology of China, Suzhou? 215123, China
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WANG RimingWANG Riming
Shenzhen Institute of Advanced Electronic Materials, Shenzhen? 518103, China；Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen? 518055, China；
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YU ShuhuiYU Shuhui
Shenzhen Institute of Advanced Electronic Materials, Shenzhen? 518103, China；Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen? 518055, China；
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CHU BaojinCHU Baojin
CAS Key Lab Mat Energy Convers, University of Science and Technology of China, Hefei? 230026, China
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SUN RongSUN Rong
Shenzhen Institute of Advanced Electronic Materials, Shenzhen? 518103, China；Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences, Shenzhen? 518055, China；
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Funding:the National Key R & D Project from Minister of Science and Technology of China (2017YFB0406300)
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Abstract:

The use of Tantalum (Ta) electrolytic capacitors as embedded components constitutes a promising strategy to extend the application of embedded capacitors, because Ta electrolytic capacitor can provide both high capacitance and excellent stability. However, the huge thickness of conventional Ta electrolytic capacitor makes it hard to be embedded in a printed circuit board or substrate. In this work, we propose to employ the electrochemical etching of thin Ta foils to fabricate the anode of Ta electrolytic capacitors for embedded application.The specific capacitance of electrochemically etched Ta anode reaches as high as 74 nF/mm2 when measured in 0.1 mol/L H2SO4.The etched Ta anode is then fabricated into electrolytic capacitors, and a stable capacitance of ＞30 nF/mm2 is demonstrated in the frequency range from 100 Hz to 1 MHz and a low leakage current of 2.7×10－6 A for a duration of 1 200 seconds at a direct voltage (DC) of 10 V. The whole thickness of the capacitor is decreased to~75 μm.

Key words:embedded capacitor; Tantalum electrolytic capacitor; electrochemical etching; high capacitance

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GUO Yongfu, WANG Riming, YU Shuhui, et al. High-Capacitance Thin Film Tantalum Electrolytic Capacitor Fabricated from Electrochemically Etched Tantalum Foils[J]. Journal of Integration Technology,2021,10(1):35-46

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Online: January 26,2021
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